Amperage-class ion source for milling equipment
Custom-made options are available to meet your needs for ion sources for MEMS processing equipment!
This product is a large ion source suitable for high-speed milling processing using a large-area ion beam. By adopting heat-resistant/low-sputter-rate electrode materials, it generates low-energy ampere-class ion beams. We offer custom-made solutions to meet your requirements. 【Features】 ■ Optimization of beam uniformity through charged particle trajectory simulation ■ Adoption of heat-resistant/low-sputter-rate electrode materials ■ Generation of low-energy ampere-class ion beams *For more details, please refer to the PDF document or feel free to contact us.
- Company：ノベリオンシステムズ
- Price：Other
